【Sample Preparation】Plasma Cleaning Machine

Name: Plasma cleaning machine

Manufacturer: Gatan, Inc., U.S.

Purchasing date: 10, 2012

Main technical indicators:

1. Three gas input channel (O₂, H₂, Ar)

2. Oxygen and hydrogen flow controller

3. Independent power supply

4. Reserved interface for TEM sample holders

5. Large sample chamber with diameter> 8cm, height> 5cm

Common accessories: special interface for TEM sample holder, nitrogen, oxygen, hydrogen

Main application area: electronic microscopy sample cleaning

Main functions:

1. Rinsing standard TEM sample holder: applicable for side-plug TEM sample holder to remove hydrocarbon contamination for TEM sample carrier and sample.
2. STEM analysis: It can be used to remove surface contamination of samples and sample holder, prevent carbon deposition from reducing the image resolution, and misjudgment on micro-analysis of the sample, improve its imaging capability at low-voltage and its accuracy on trace chemical analysis. It provides more time for reading and data-getting times for EDS and SEM. It is applicable to field emission scanning electron microscopy, field emission TEM, SEM and EDS analysis.
3. The multifunctional cavity can take two TEM sample holders and load a variety of scanning samples.
4. It has dedicated chemical gas H₂/O₂, which can reduce the sputtering damage of samples in the process of chemical cleaning and can also be used to clean porous carbon film.

Person in charge of the equipment: Zhang Weina

Ways of contact:

Tel: 13604028597 024-83686411

E-mail:

Location: Room 101, RAL Building

Operation Rules

1. Preparation before operation: ensure Ar and O₂ gas cylinders are not empty;

2. Power on the machine and start it. Check whether the gas connection is normal in the front-end displayer of the equipment;

3. Put the TEM sample into the sample electron microscope sample holder;

4. Put the sample holder into FEI connector, and insert it into lasma cleaning machine. Make sure they are tightly connected.

5. Select plasma gas components (TEM, STEM and other models);

6. Click the “Vacuum” button; observe the sample chamber vacuum achieve its rated value;

7. Click the “Start” button to start cleaning;

8. After cleaning, click “Deflation” button. After deflation, take out the sample and reconnect the sealed port to the interface. After experiment, stop the host and cylinders.

Attention: When the equipment is not in use, try to keep Ar and O₂ plasma cleaning machine connected to avoid gas channel from being contaminated.