Name: Field emission scanning electron microscope (FESEM)
Manufacturer: German Zeiss
Purchasing date: December, 2010
Main technical indicators: Resolution: 1.0nm
Common accessories: EDS, EBSD analysis system (EBSD)
Main application areas: metallic materials
Main functions: material surface morphology observation, crystal orientation analysis of micro-area composition and the polycrystalline materials
Person in charge of the equipment: Wang Jiafu
Ways of contact:
Tel: 83673168
Email:
Location: Room 103B, RAL
Operation Rules
- Check the power supply, cooling water system and nitrogen system before starting the machine.
- Turn on the host power supply;
- Operate “smart SEM” software, and the EM server will carry out self-check automatically.
- After deflation, place the clean sample into the sample chamber correctly, and close the sample chamber;
- Click the “Vacuum” button to vacuumize the chamber
- After it meets the requirements of vacuum level, impose high pressure;
- Adjust the parameters of electronic microscope (accelerating voltage, the beam spot size, the magnification and the scanning rate, etc.)
- After observation and analysis, stop high-pressure. Never deflate until the filament cooled down. Replace the sample.
- After experiment, set the system in the proper state (off mode, standby mode and night mode) according to its actual condition.